Thickness mode high frequency MEMS piezoelectric micro ultrasound transducers

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Thickness mode high frequency MEMS piezoelectric micro ultrasound transducers

Thickness mode piezoelectric micro-electromechanical system (MEMS) ultrasound transducers, operating in the 50-75 MHz range, have been fabricated using a composite sol gel technique in combination with wet etching. The composite sol gel technique involves producing a PZT powder/sol composite slurry, which when spun down yields films a few micrometers thick. Repeated layering, and infiltration, ...

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ژورنال

عنوان ژورنال: Journal of Electroceramics

سال: 2007

ISSN: 1385-3449,1573-8663

DOI: 10.1007/s10832-007-9317-x